?IS200EDCFG1A
IS200EDCFG1AIS200EDCFG1A
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相關(guān)技術(shù)參數(shù)如下:
2.1?水環(huán)式真空泵:?
型號(hào):SKA-720???????????????????????最大抽速:?635m3/min
額定轉(zhuǎn)速:340r/min??????????????????極限真空度:160MPa
2.2?配用電動(dòng)機(jī):
型號(hào):YB63052-4???????????????????????額定功率:900kW
額定電壓:6kV?????????????????????????額定電流:104.2A?
額定轉(zhuǎn)速:1483r/min???????????????????功率因數(shù):0.87
3?高壓變頻器調(diào)速系統(tǒng)方案
3.1高壓變頻器的系統(tǒng)結(jié)構(gòu)特點(diǎn)
HARSVERT-A系列高壓變頻器由移相變壓器、功率單元模塊和控制器組成。內(nèi)部十五個(gè)相同的功率單元模每五個(gè)模塊為一組構(gòu)成一相,分別對(duì)應(yīng)高壓回路的三相。
5 AMAT 0010-76173 Throttle valve hinge and isolation valve assembly, price for 5
NEW Varian F50able Assembly, Assy
FESTO Vacuum Control SA-23241, Vacuum Control Manifold CPV10-V1 CPV-V1-P8 161415
Allen-Bradley 440R-ZBR520AZ1 Guardmaster Relay, Series A
EUROTHERM 2408i
Rack Assembly, with Double Ended Drawer Assembly
Pittman Lo-Cog, 9433K120-R1, 676-6122, 24 VDC, 500 CPR, 398343
?Silicon Thermal Power cool LB300 chiller with dual power outputs
Pfeiffer TMH071 Turbo Pump, new in OEM box
B&B electric 485CON RS 2320485 converter
Kinetics Gas Line, APTech AP1010SM 2PW FV4 FV4 SB, Swagelok 6LV-DAVR4-P
Lift Comb , 114-4048-02, wafer holder, New, lot of 3
2 new HBC controls HBC-558, heater solid state relays on heat sink
Excelon B74G-4GK-AP3-RMN, Filter regulator water separator
Lot of 3, REGAL FS-30, manifolds with REGAL FS-SE type flow sensors
Lytron Chiller RC006G03BB1C020
AMAT 0190-00398 ASTeX ARX-X491-P 3Kw Microwave Control Module ARX-X491 399625
ENI VL-400 M1 Phase shift controller
Microcon C15Sa series Rinser controller
New Diversified technologies 651200978 computer board, intel 386, 0125-104178
Asyst Wafer Mapper, LaserMax, S426, Asyst 9700-6602-01
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6 Mouser Electronics 172-E15-213R911 Conn DB15 Female SLD DIP NKL
Asyst Crossing Automation 9701-2143-01, Assy, Fru, Opt Wafer Mapper, BTB, 398652
Setra Pressure Transmitter, C207, 0-100 PSIG, 24 VDC, 4-20 MA
AMAT 0040-33564 Release Shaft, Quick Change 2.1 Brush Mo
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?RN592-4002 PCB NIKON. Description: PCB, DISPLAY, SCOPE
Micromega Temperature controller with ILX lightwave 5991186 RTD converter
NOVOTRON NOVODRIVE ND21-5615KS-011-00
IPEC Speedfam 2805-11273652001 TC gauge controller
Veeco 0340-655-01, Auto neutralization controller
BODINE ELECTRIC 4go
6 AMAT 0010-76173 Throttle valve hinge and isolation valve assembly, price for 6
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6 ?cleaned shields 233-3056-57, CC, LG clamp API-492
US Digital Optical Kit Encoder, E4P-300-250-D-D-D-B, M004004
5 ?new Greene Tweed Chemraz NO17835083SS592 350.83 x 1.78 mm
Disco Switch Unit M0HEH035--B Direct Acting Solenoid Water Valve CKD FWB41-X1690
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New, ICE MIO-A-2-608, Analog voltage 2 point output module
Allen-Bradley 1734D-IB8X0B8E Point I/O Module, 1734-RTB, 95716002, 95722702
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Lot of 7 NEW Power one HCC15-3-A 12VDC or 15VDC power supplies
AMAT 0100-90730 PWBA Gas Supplies Servo
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Andrew L4PDM-RC Ringflare 7-16 Din Male Connector for HELIAX LDF4-50A Coaxial
5 New UE precision EA100D-32 Staset ?precision pressure switch, built in display
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2 Kinetics Gas Line, Swagelok 6LV-DAVR4-P-NW, APTech AP1010SM 2PW FV4 FV4 SB
LAM 8" cathode ceramic and anodized aluminum?
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4 SMC XLG-16-X1085 vacuum isolation valves, KF16, Right Angle, w position switch
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Asyst Computer Control, ABF0099752
4 Kinetics Gas Line, Tescom 44-2213-242-010, Pall SGLFPF6402VMM4, Swagelok
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Crossing Automation 3200-4414-01 450 KPlate Node
Kinetics Gas Line, Tescom 60 64-2661KRT20-047, Hamlet HM20 4VKLQ M4, Pall
New Wave Research AS200FX Optical Plate, 10-3512RC PCBA
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Alcatel BN111, 8039 Gauge controller
ASTeX ?ABX-X348 ETO driver b2A3FEPM-E4 GEARMOTOR, 130 VOLTS, CLEAN
?IPEC speedfam 4191998-0001 Wafer head gear motor kit
Asyst Bubble 9320496 for modified aligner
Asyst 3200-1232-01 WH-ASP Core ISA Com Card
Swagelok MS-ISK-DP-CM bellows valve indicator switch retrofit kit
11 new SMC D-Z73, reed switches with indicators
2 Asyst 9701-1190-01 C Signal Tower Assy 210-70320-00
KF40 Bellows, Vacuum Bellows
Piezo Control E-610.K001, Zyoard water cooled
Kinetics Gas Line, Tescom 250, Millipore WG2F01HS1, USG Meter
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AMAT 0190-00398 AGL D13450 Microwave Control Module 3 Kilowatt Controller 399640
4 Mouser Electronics 172-E09-113R911 9 POS. DIP/SO. Male D-Sub Connectors
3 Mouser Electronics 172-E09-113R911 9 POS. DIP/SO. Male D-Sub Connectors
Lot of 3 Mouser Electronics 172-E25-213R911 Conn DB25 Female SLD DIP NKL
New UE precision LDP0.1WC/25P-16 Echoline ?Low differential pressure switch
Ransco Despatch Fast Rate Cycling Chamber Oven with LN2 low pressure injection
5 IPEC Speedfam Novellus 952363, Entegris Q4000 Ball valve ?
5 New, ICE MIO-IDC-32-300, ?24VDC 32 point input modules
AMAT 0100-40029 PCBA, Source Metrology BD
Burkert SYST-2030-A-15, Fluid Control System w Diaphragm Valve, PTFE-PD-SS25-D-E
2 Kinetics Fluid System Gas Line, Tescom 250, Millipore C9EM703, USG Meter
New Allenair ?E 2X2*16 BC RM #124 ?Air cylinder , 9215-3240-0
AMAT 0190-13922 External Encoder cable, version 2
AMAT 0040-22024 Endura PVD, standard chamber, 0200-24746 Shield, clips, spacer
Kinetics Gas Line, APtech AP1010SM, Ametek gauge, Pall Filter, bent gas line
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Thermo Electron Neslab HX 75W BOM#386204061601 Recirculating chiller w filters
Thermo Electron Neslab HX75W 386204061602 ?chiller w external filters 395473
FESTO CPV-10-VI 273515 Vacuum Control - AMA CPV10-DNET8-AMA-SA, 175775, 183643
Aluminum Vacuum Chamber labeled Thermal Test system 18"x18"x6"
MASS FLOW CONTROLLER MC-2100?
6 used Eurotherm RSDA 25A 660V LDC Solid State Relay+Heatsink, 4-28 VDC
Piezo Calibration Module E810.11 Physik Instrument
Kinetics Gas Line, Tescom 60, Ametek Gauge, Pall Filter SGLFPF6402VMM4, Swagelok
Novellus 60-114757-00 VAT Monovalve, Alum, Heated 02109-BA24-AMU 1/0004
?Novellus 60-114757-00 VAT monovalve aluminum heated?
2 Dainippon ?SEPC-0065 TU controller, 2-VC-13234
Kinetics Gas Line, Regulator Tescom 44-2213-242-010, Ashcroft gauge, swagelok
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ACS Motion Control SB1003BL-B1P, 3-Axis Servo Motion Controller, ACS SB Driver
5 new Greene Tweed Chemraz 9248-SC520 4.734 x 0.139 in., O-ring 22-174296-00
New VEXTA 2 phaDI-6DO, AMAT 102150930 CPU - Module XC - CPU201
AMAT 0190-00398 AGL D13450 Microwave Control Module 3 Kilowatt Controller 399627
AMAT 0190-00398 AGL D13450 Microwave Control Module 3 Kilowatt Controller 399626
Brooks 001-7600-02 VacuTran 5 VTR5 Transfer Robot Drive
Delta Design Summit 1909177 Thermal Control Pick & Place Handler
Entegris 6500-T3-F02-D00-K-P2-U1-M07 Integrated flow controller, 500 mLpm
TEGAL Front Robot Loader interface
3 New OGURA Clutch RNB 0.2G DC-24V US Digital E3 9701-3985-01
HPS MKS 4515-0016 insulator, heat blanket, KF40 flange?
Aerotech Motion Controls MX50-D-8M, Signal Multiplier, D-Sub 25 Pin and Cable
Masterflex cole parmer 7552-76 washdown modular controllers AC3003A1 enclosed?
AMAT 0190-00398 ASTeX ARX-X491 Microwave Control Module ARX-X491 399638
Kinetics Gas stick APTECH AP1010SM Regulator Swagelok 6LVV, Millipore, Pall, 923
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CKD AMD43-20BUS-16-VT Flow Valve, New
2 EATON AXCELIS 1100440 Feedthrough Assembly 20 KV A, CERAMIC
New, Infranor SMTAS 220/10, Servo Amplifier, 10A peak, Surplus inventory
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3 new HBC controls HBC-824-3, heater solid state relays on heat sink
2 Kinetics Fluid System Gse stepping motors PK266-E2.0A,?
Lot of 2 AMAT 0020-32151 ESC Chuck 200mm, notch, HVIB, 0040-09797, 0010-10257
Super Vexta 5-Phase Driver UDX5114NA
Phillips Asembleon PA130800 Eclipse Fine Pitch Placement system 2 heads 6500 /hr
Nor-Cal Products AIV-1002-NWB, 1" Manual Angle-In-Line Valve, NW-25 Flanges
Asyst 3200-4348-04 PCBA
Semitool 900T0293-01 ?Preclean / Etch w/ Remote 5 Axis ?w/ 4 Yaskawa SGDH-01AE
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