266掃描透鏡F-Theta掃描透鏡266nmPartNo.EFL(mm)ScanningAngle( )ScanLength(mm)ScanField(mm)Ent.Pupil(mm)AverageSpotSize(um)Length(mm)WD(mm)SL-266-70-100101.529.210370*7058.2552129.4SL-266-100-160162.325141100*100516.536.75198.76SL-266-90-2542541815690*9041647253