機型LSM-500HLSM-501HLSM-503HLSM-506HLSM-512H型號544-552544-553544-555544-556544-558544-559544-572544-573544-575544-576檢驗標準FDAIECFDAIECFDAIECFDAIECFDAIEC測量范圍0．005-2mm0．05-10mm0．3-30mm1-60mm1-120mm最小讀值0．00001-0．01mm0．00001-0．01mm0．00002-0．1mm0．00005-0．1mm0．0001-0．1mm重現(xiàn)性?0.04um?0.05um?0.15um?0.5um?1.2um直線性?0.3um?0.5um?1.0um?3m?6um位置誤差?0.4um?0.5um?1.5um?4m?8um測量區(qū)域1x2mm當0.05-0.1mm時為2X10mm；當0.1-10mm時為4X10mm10X30mm20x60mm30X120mm掃描頻率1600回/秒1600回/秒1600回/秒1600回/秒1600回/秒掃描速度38m/s57m/s113m/s226m/s452m/s環(huán)境溫度0-40℃環(huán)境濕度35-85%